Nature research paper: Cilia metasurfaces for electronically programmable microfluidic manipulation
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.were first grown and patterned as the release layer. 3-nm Ti and 7-nm Pt were then grown and patterned as the actuator. Finally, several polymer panels were patterned on the actuator to prevent twisting of the cilium.
The cyclic voltammetry curve for an artificial cilium actuated between −0.2 V to 1 V at a sweep rate of 1 V sExtended Data Fig. 3 Durability of artificial cilia. Shown is the relative velocity versus the number of actuation cycles. The relative velocity is scaled by the initial pumping velocity. We find no obvious decay after 1,000 actuation cycles. The linear fit to the data indicates that the relative velocity will decrease by 50% after approximately 20,000 actuation cycles., A cilium beating at around 1 Hz, corresponding to a Sperm number of 1. At these low Sperm numbers, the viscous force is not large enough to break the actuation symmetry.
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